Post-CMOS compatible high-throughput fabrication of AlN-based piezoelectric microcantilevers

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|2|25003-25013

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.2, 2015-02, pp. : 25003-25013

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