Journal of Materials Science: Materials in Electronics,volume 15,issue 5  (05-2014)

Period of time: 2014年5期

Publisher: Springer Publishing Company

Founded in: 1990

Total resources: 58

ISSN: 0957-4522

Subject: TB General Industrial Technology

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Journal of Materials Science: Materials in Electronics,volume 15,issue 5

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Dielectric properties of AlN film on Si substrate

By Bi Z. X.,Zheng Y. D.,Zhang R.,Gu S. L.,Xiu X. Q.,Zhou L. L.,Shen B.,Chen D. J.,Shi Y. in (2004)

Journal of Materials Science: Materials in Electronics,volume 15,issue 5 , Vol. 15, Iss. 5, 2004-05 , pp. 317-320

Springer Publishing Company

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