Dielectric properties of AlN film on Si substrate

Author： Bi Z. X.   Zheng Y. D.   Zhang R.   Gu S. L.   Xiu X. Q.   Zhou L. L.   Shen B.   Chen D. J.   Shi Y.  

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.15, Iss.5, 2004-05, pp. : 317-320

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