Experimental and theoretical study of the role of the gas composition and plasma-surface interactions on the SnO x films stoichiometry prepared by DC magnetron reactive sputtering

Author： Snyders R.   Wautelet M.   Gouttebaron R.   Dauchot J.P.   Hecq M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.423, Iss.2, 2003-01, pp. : 125-130

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