Composite germanium/C:H films prepared by DC unbalanced magnetron sputtering

Author: Biederman H.   Stundzia   Slavnska D.   Zalman   Pesicka   Vanecek M.   Zemek   Fukarek W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.351, Iss.1, 1999-08, pp. : 151-157

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Abstract