Advanced MFIS Structure with Al 2 O 3 /Si 3 N 4 Stacked Buffer Layer

Author: Fujisaki Yoshihisa   Ogasawara Satoru   Ishiwara Hiroshi  

Publisher: Taylor & Francis Ltd

ISSN: 0015-0193

Source: Ferroelectrics, Vol.292, Iss.1, 2003-01, pp. : 3-13

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Abstract