Application of electron cyclotron resonance chemical vapour deposition in the preparation of hydrogenated boron-doped SiC films

Author: Yoon S. F.   Ahn J.  

Publisher: Taylor & Francis Ltd

ISSN: 1463-6417

Source: Philosophical Magazine B, Vol.77, Iss.1, 1998-01, pp. : 197-206

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract