Micropositioning device for automatic alignment of substrates for industrial-scale thin films deposition

Author： Castañeda A Apátiga L.M. Velázquez R Castaño V.M.

ISSN： 0144-5154

Source： Assembly Automation, Vol.21, Iss.4, 2001-10, pp. : 336-341

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Algorithms for Automatic Alignment of Arrays

By Chatterjee S. Gilbert J.R. Oliker L. Schreiber R. Sheffler T.J.

Journal of Parallel and Distributed Computing, Vol. 38, Iss. 2, 1996-11 ,pp. : 145-157

Academic Press

Access to resources Recommend Favorite

Frequency Response of Thin-Film Bulk Acoustic Resonators to the Deposition of Tungsten, Platinum, Aluminium Oxide and Carbon Nanotube Thin-Films

Micro and Nanosystems, Vol. 4, Iss. 2, 2012-06 ,pp. : 111-117

Bentham Science Publishers

Access to resources Recommend Favorite

Characterization of aluminium nitride and aluminium oxide thin films sputter-deposited on organic substrates

By Schmid U. Ababneh A. Seidel H. Wagner R. Bauer K.

Microsystem Technologies, Vol. 14, Iss. 4-5, 2008-04 ,pp. : 483-490

Springer Publishing Company

Access to resources Recommend Favorite

Alignment of parts in automatic assembly using vibrations

By Baksys Bronius Puodziuniene Nomeda

Assembly Automation, Vol. 27, Iss. 1, 2007-02 ,pp. : 38-43

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Experimental Evaluation of Automatic Array Alignment in Parallelized Matlab

By Milosavljević I.Z. Jabri M.A.

Journal of Parallel and Distributed Computing, Vol. 61, Iss. 6, 2001-06 ,pp. : 784-809

Academic Press

Access to resources Recommend Favorite