Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique

Author： Zhang Y.C. Wu Y.F. Ma S.G. Sun S.N. Zhou Y. Geng M.

ISSN： 0952-8091

Source： International Journal of Computer Applications in Technology, Vol.29, Iss.2-4, 2007-09, pp. : 173-177

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