Numerical modeling of 3D intelligent comb drive accelerometer structure: Mechanical models

Author： Wiak Slawomir Smólka Krzysztof Dems Maria Komeza Krzysztof

ISSN： 0332-1649

Source： COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.25, Iss.3, 2006-07, pp. : 697-704

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