

Author: Kosugi H.
Publisher: Oxford University Press
ISSN: 0022-0744
Source: Journal of Electron Microscopy, Vol.46, Iss.6, 1998-01, pp. : 473-476
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Abstract
A high-resolution electron microscopy image of W8Ta2O29 was observed with an imaging plate and the intensity distribution of the image was compared with simulated images. A residual index between the intensity of the observed image and that of calculated images was evaluated for 109 sampling points in the unit cell of the WO3 block structure. The residual index 0.0401 was obtained by changing the parameters such as crystal thickness and defocus value. Furthermore, the residual index 0.0304 was obtained by averaging the image to remove the noises such as the quantum noises and taking into account the inclination of the incident electron beam. Accuracy and limitation of structure analysis by quantitative high-resolution electron microscopy are briefly discussed. Keywords:residual index, imaging plate, high-resolution electron microscopy, quantitative analysis, image simulation, block structure.
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