Note. Quantitative analysis of a high-resolution electron microscopy image of WO 3 block structure with a residual index

Author： Kosugi H.

Publisher： Oxford University Press

ISSN： 0022-0744

Source： Journal of Electron Microscopy, Vol.46, Iss.6, 1998-01, pp. : 473-476

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Abstract

A high-resolution electron microscopy image of W₈Ta₂O₂₉ was observed with an imaging plate and the intensity distribution of the image was compared with simulated images. A residual index between the intensity of the observed image and that of calculated images was evaluated for 109 sampling points in the unit cell of the WO₃ block structure. The residual index 0.0401 was obtained by changing the parameters such as crystal thickness and defocus value. Furthermore, the residual index 0.0304 was obtained by averaging the image to remove the noises such as the quantum noises and taking into account the inclination of the incident electron beam. Accuracy and limitation of structure analysis by quantitative high-resolution electron microscopy are briefly discussed. Keywords:residual index, imaging plate, high-resolution electron microscopy, quantitative analysis, image simulation, block structure.