Chemical junction delineation of a specific site in Si devices

Author: Eo Hee-Joo   Yang Jun-Mo   Park Tae-Su   Lee Jong-Pill   Kim Won   Park Ju-Chul   Lee Soun-Young  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.53, Iss.3, 2004-06, pp. : 277-280

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Abstract