Microsampling technique for EBSP inspection on the cross-sections of copper trench lines in ULSIs

Author: Hirose Yukinori   Hashikawa Naoto   Fukumoto Koji   Mashiko Yoji  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.53, Iss.5, 2004-10, pp. : 567-570

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