Microsampling technique for EBSP inspection on the cross-sections of copper trench lines in ULSIs

By Hirose Yukinori   Hashikawa Naoto   Fukumoto Koji   Mashiko Yoji  

Journal of Electron Microscopy, Vol. 53, Iss. 5, 2004-10 ,pp. : 567-570

Oxford University Press

Access to resources Recommend Favorite

Specimen preparation for high-resolution transmission electron microscopy using focused ion beam and Ar ion milling

By Sasaki Hirokazu  

Journal of Electron Microscopy, Vol. 53, Iss. 5, 2004-10 ,pp. : 497-500

Oxford University Press

Access to resources Recommend Favorite

Transmission electron microscopy and atom probe specimen preparation from mechanically alloyed powder using the focused ion-beam lift-out technique

By Choi Pyuck-Pa   Kwon Young-Soon   Kim Ji-Soon   Al-Kassab Tala’at  

Journal of Electron Microscopy, Vol. 56, Iss. 2, 2007-04 ,pp. : 43-49

Oxford University Press

Access to resources Recommend Favorite

Fabrication of a TEM sample of ion-irradiated material using focused ion beam microprocessing and low-energy Ar ion milling

By Jin Hyung-Ha   Shin Chansun   Kwon Junhyun  

Journal of Electron Microscopy, Vol. 59, Iss. 6, 2010-12 ,pp. : 463-468

Oxford University Press

Access to resources Recommend Favorite

A review of focused ion beam technology and its applications in transmission electron microscopy

By Sugiyama Masaaki   Sigesato Genichi  

Journal of Electron Microscopy, Vol. 53, Iss. 5, 2004-10 ,pp. : 527-536

Oxford University Press

Access to resources Recommend Favorite