Removing focused ion-beam damages on transmission electron microscopy specimens by using a plasma cleaner

Author: Hata Satoshi   Sosiati Harini   Kuwano Noriyuki   Itakura Masaru   Nakano Takayoshi   Umakoshi Yukichi  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.55, Iss.1, 2006-01, pp. : 23-26

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Abstract