Experimental study and theoretical analysis of the nanometre-scale line structure fabrication by AFM electric lithography

Author: Yang Ye   Zhao Wansheng  

Publisher: Inderscience Publishers

ISSN: 1746-9392

Source: International Journal of Nanomanufacturing, Vol.9, Iss.2, 2013-07, pp. : 164-177

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract