Electron Number Density Measurements in Ar and Ar-N2 Inductively Coupled Plasmas

Author: Montaser Akbar   Fassel Velmer A.  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.36, Iss.6, 1982-11, pp. : 613-617

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