The effects of bias polarity on diamond deposition by hot-filament chemical vapor deposition

Author: Chen W   Xiao C   Yang Q   Moewes A   Hirose A  

Publisher: NRC Research Press

ISSN: 1208-6045

Source: Canadian Journal of Physics, Vol.83, Iss.7, 2005-07, pp. : 753-759

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract