A Novel Model of the H Radical in Hot-Filament Chemical Vapor Deposition

Author： Xiao-Song Guo   Zhong Bao   Shan-Shan Zhang   Er-Qing Xie  

Publisher： IOP Publishing

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.28, Iss.2, 2011-02, pp. : 28101-28104

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

The effects of bias polarity on diamond deposition by hot-filament chemical vapor deposition

By Chen W   Xiao C   Yang Q   Moewes A   Hirose A  

Canadian Journal of Physics, Vol. 83, Iss. 7, 2005-07 ,pp. : 753-759

NRC Research Press

Access to resources Recommend Favorite

Effect of Substrate Temperature on the Structural, Electrical and Optical Properties of Nanocrystalline Silicon Films in Hot-Filament Chemical Vapor Deposition

By Xiao-Song Guo   Shan-Shan Zhang   Zhong Bao   Hong-Liang Zhang   Chang-Cheng Chen   Li-Xin Liu   Yan-Xia Liu   Er-Qing Xie  

Chinese Physics Letters, Vol. 28, Iss. 2, 2011-02 ,pp. : 28103-28106

IOP Publishing

Access to resources Recommend Favorite

INFLUENCE OF THE FILAMENT MATERIAL ON LOW-PRESSURE HOT-FILAMENT CVD DIAMOND DEPOSITION

By  

Le Journal de Physique IV, Vol. 02, Iss. C2, 1991-09 ,pp. : C2-923-C2-930

Edp Sciences

Access to resources Recommend Favorite

DEPOSITION OF DIAMOND LAYERS BY HOT-FILAMENT ACTIVATED CVD USING ACETONE AS A CARBON SOURCE

By  

Le Journal de Physique Colloques, Vol. 50, Iss. C5, 1989-05 ,pp. : C5-159-C5-168

Edp Sciences

Access to resources Recommend Favorite

Chemical vapor deposition of zinc gallate using a novel single precursor

By  

Le Journal de Physique IV, Vol. 09, Iss. PR8, 1999-09 ,pp. : Pr8-853-Pr8-860

Edp Sciences

Access to resources Recommend Favorite