Effect of Substrate Temperature on the Structural, Electrical and Optical Properties of Nanocrystalline Silicon Films in Hot-Filament Chemical Vapor Deposition

Author： Xiao-Song Guo   Shan-Shan Zhang   Zhong Bao   Hong-Liang Zhang   Chang-Cheng Chen   Li-Xin Liu   Yan-Xia Liu   Er-Qing Xie  

Publisher： IOP Publishing

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.28, Iss.2, 2011-02, pp. : 28103-28106

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