Influence of the Plasma Chemistry on the Composition of ZrOx and NbOx Thin Films Deposited by Reactive Magnetron Sputtering

Author： Mráz Stanislav   Schneider Jochen  

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.26, Iss.2, 2006-04, pp. : 197-203

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Phase Composition of Films Deposited by ZrB2 RF Magnetron Sputtering

By Ignatenko P.I.   Terpii D.N.   Goncharov A.A.  

Inorganic Materials, Vol. 39, Iss. 5, 2003-05 ,pp. : 464-468

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Structural, Mechanical and Tribological Properties of NbCN-Ag Nanocomposite Films Deposited by Reactive Magnetron Sputtering

By Wu Fanjing   Yu Lihua   Ju Hongbo   Asempah Isaac   Xu Junhua  

Coatings, Vol. 8, Iss. 2, 2018-01 ,pp. : 50-50

MDPI

Access to resources Recommend Favorite

Nano-porous TiN thin films deposited by reactive sputtering method

By Fang Q.   Zhang J.-Y.  

The International Journal of Inorganic Materials, Vol. 3, Iss. 8, 2001-12 ,pp. : 1193-1196

Elsevier

Access to resources Recommend Favorite

Effect of VB2RF Magnetron Sputtering Conditions on the Composition and Structure of Deposited Films

By Ignatenko P.I.   Terpii D.N.   Petukhov V.V.   Goncharov A.A.  

Inorganic Materials, Vol. 37, Iss. 10, 2001-10 ,pp. : 1021-1023

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite