Erbium and Germanium Profiles in Si1 – xGex Layers Grown by Silicon Sublimation-Source Molecular-Beam Epitaxy in GeH4

Author: Shengurov V.G.   Svetlov S.P.   Chalkov V.Y.   Andreev B.A.   Krasil'nik Z.F.   Ber B.Y.   Drozdov Y.N.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.39, Iss.1, 2003-01, pp. : 3-5

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