Electrical properties of films grown on W and Mo substrates by titanium ion implantation in nitrogen atmosphere

Author: Ignatenko P.   Badekin M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.41, Iss.3, 2005-03, pp. : 243-246

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Abstract