Properties of BC x N y films grown by plasma-enhanced chemical vapor deposition from N-trimethylborazine-nitrogen mixtures

Author: Sulyaeva V.   Kosinova M.   Rumyantsev Yu.   Golubenko A.   Fainer N.   Alferova N.   Ayupov B.   Gevko P.   Kesler V.   Kolesov B.   Maksimovskii E.   Myakishev K.   Yushina I.   Kuznetsov F.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.46, Iss.5, 2010-05, pp. : 487-494

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