Thermodynamic Modeling of BCxNy Chemical Vapor Deposition in the B–C–N–H System

Author: Golubenko A.N.   Kosinova M.L.   Titov A.A.   Kuznetsov F.A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.39, Iss.4, 2003-04, pp. : 362-365

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