Microstructure and properties of nc-TiC/a-C:H films deposited by radio frequency reactive sputtering

Author: Liu X Q   Yang J   Hao J Y   Liu W M  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.27, Iss.11, 2011-11, pp. : 1669-1673

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Abstract