Principle and applications of MEMS: a review

ISSN： 1368-2148

Source： International Journal of Manufacturing Technology and Management, Vol.13, Iss.2-3, 2008-01, pp. : 324-343

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

A review of MEMS oscillators for frequency reference and timing applications

By van Beek J T M Puers R

Journal of Micromechanics and Microengineering, Vol. 22, Iss. 1, 2012-01 ,pp. : 13001-13035

IOP Publishing

Access to resources Recommend Favorite

Review of the potential of a wireless MEMS microsystem for biomedical applications

By Arshak A Arshak K Lyons G Waldron D Morris D Korostynska O Jafer E

Sensor Review, Vol. 25, Iss. 4, 2005-04 ,pp. : 277-286

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Recent developments in MEMS sensors: a review of applications, markets and technologies

By Bogue Robert

Sensor Review, Vol. 33, Iss. 4, 2013-09 ,pp. : 300-304

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

By Jiang Shulan Shi Tielin Zhan Xiaobin Xi Shuang Long Hu Gong Bo Li Junjie Cheng Siyi Huang Yuanyuan Tang Zirong

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 11, 2015-11 ,pp. : 113001-113018

IOP Publishing

Access to resources Recommend Favorite

Review of MEMS metrology solutions

By Nichols James F. Shilling Meghan Kurfess Thomas R.

International Journal of Manufacturing Technology and Management, Vol. 13, Iss. 2-3, 2008-01 ,pp. : 344-359

Inderscience Publishers

Access to resources Recommend Favorite