Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon

Author： Wang Chunlei   Zaouk Rabih   Park Benjamin Y.   Madou Marc J.  

Publisher： Inderscience Publishers

ISSN： 1368-2148

Source： International Journal of Manufacturing Technology and Management, Vol.13, Iss.2-3, 2008-01, pp. : 360-375

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