Author： Bibilo P. N. Vasil'kova I. V. Kardash S. N. Kirienko N. A. Loginova I. P. Novikov Ya. A. Romanov V. I. Toropov N. R. Cheremisinov D. I. Cheremisinova L. D.
Publisher： MAIK Nauka/Interperiodica
ISSN： 1063-7397
Source： Russian Microelectronics, Vol.33, Iss.5, 2004-09, pp. : 310-327
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