Electrical Behavior of In Situ Doped Polysilicon Films as Influenced by the Dopants

Author： Kovalevskii A. Borisenko V. Borisevich V. Dolbik A.

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.34, Iss.3, 2005-05, pp. : 140-146

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