Effect of doping on the temperature coefficient of resistance of polysilicon films

Author： Kovalevskii A.   Dolbik A.   Voitekh S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.36, Iss.3, 2007-05, pp. : 153-158

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