Structural and Luminescent Properties of SiOxNy(Si) Nanocomposite Films

Author: Baru V.   Bayliss S.   Zhitov V.   Zakharov L.   Kartopu G.   Pokalyakin V.   Sapelkin A.   Stepanov G.   Timofeev A.   Shevchenko O.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.34, Iss.5, 2005-09, pp. : 272-278

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