Evolution of the Co–N/Ti/Si System in Magnetron Sputtering of Co onto a Heated Ti/Si(100) Substrate

By Vasiliev A. G.   Vasiliev A. L.   Zakharov R. A.   Orlikovsky A. A.   Horin I. A.   Eindou M.  

Russian Microelectronics, Vol. 33, Iss. 1, 2004-01 ,pp. : 1-6

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Structural and Luminescent Properties of SiO_xN_y(Si) Nanocomposite Films

By Baru V.   Bayliss S.   Zhitov V.   Zakharov L.   Kartopu G.   Pokalyakin V.   Sapelkin A.   Stepanov G.   Timofeev A.   Shevchenko O.  

Russian Microelectronics, Vol. 34, Iss. 5, 2005-09 ,pp. : 272-278

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Electroluminescence mechanisms in SiO _x N _y (Si) nanocomposite films

By Baru V.   Zhitov V.   Zakharov L.   Izotov A.   Pokalyakin V.   Stepanov G.   Shevchenko O.   Shteinman E.  

Russian Microelectronics, Vol. 35, Iss. 2, 2006-03 ,pp. : 78-86

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Calculation of the concentration profile of copper in the TiN/CoSi₂/Si system during thermal heating

By Rudakov V.   Gusev V.  

Russian Microelectronics, Vol. 38, Iss. 4, 2009-07 ,pp. : 279-284

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Silicide formation in co-deposited TiSi x layers: The effect of deposition temperature and Mo

By Ohmi S.   Tung R.  

Journal of Electronic Materials, Vol. 28, Iss. 10, 1999-10 ,pp. : 1115-1122

Springer Publishing Company

Access to resources Recommend Favorite