Borophosphosilicate Glass Films in Silicon Microelectronics, Part 1: Chemical Vapor Deposition, Composition, and Properties

By Vasilev V. Y.  

Russian Microelectronics, Vol. 33, Iss. 5, 2004-09 ,pp. : 271-284

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Borophosphosilicate glass films in silicon microelectronics, part 2: Structure and applications

By Vasilev V.  

Russian Microelectronics, Vol. 34, Iss. 2, 2005-03 ,pp. : 67-77

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Preparation and electrical properties of ZnO-glass ceramic films

By Huang Y.   Liu M.   Jiang S.   Zeng Y.   Li C.   Liu S.   Zhou D.  

Microelectronic Engineering, Vol. 66, Iss. 1, 2003-04 ,pp. : 760-766

Elsevier

Access to resources Recommend Favorite

Effects of Growth Temperature on Properties of Nonpolar a -Plane ZnO Films on GaN Templates by Pulsed Laser Deposition

By Dai J.  

Journal of Electronic Materials, Vol. 40, Iss. 4, 2011-04 ,pp. : 446-452

Springer Publishing Company

Access to resources Recommend Favorite

Structure and dielectric properties of Zr-Al-O thin films prepared by pulsed laser deposition

By Zhu J.   Liu Z.G.  

Microelectronic Engineering, Vol. 66, Iss. 1, 2003-04 ,pp. : 849-854

Elsevier

Access to resources Recommend Favorite