Self-organization of germanium highly ordered nanoclusters by the deposition of polycrystalline silicon films doped with germanium

Author： Kovalevskii A.   Babushkina N.   Plyakin D.   Strogova A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.39, Iss.3, 2010-06, pp. : 190-198

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