Proton beam writing: a progress review

Author: Kan Jeroen A. Van   Bettiol Andrew A.   Ansari Kambiz   Teo Ee Jin   Sum Tze Chien   Watt Frank  

Publisher: Inderscience Publishers

ISSN: 1475-7435

Source: International Journal of Nanotechnology, Vol.1, Iss.4, 2004-01, pp. : 464-479

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Abstract