3D microstructuring in p-GaAs with proton beam writing using multiple ion fluences

Author: Schulte-Borchers M   Vetter U   Koppe T   Hofsäss H  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25011-25016

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Abstract