Low stress nitride as surface isolation in bipolar transistors

Author： Nanver L. K.   French P. J.   Goudena E. J. G.   van Zeijl H. W.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.11, Iss.1, 1995-01, pp. : 36-40

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