Spectroellipsometric characterisation of thin epitaxial Si1–xGex layers

Author: Líbezný M.   Caymax M.   Brablec A.   Kuběna J.   Holý V.   Poortmans J.   Nijs J.   Vanhellemont J.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.11, Iss.10, 1995-10, pp. : 1065-1070

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Abstract