Photoreflectance characterisation of Ar + ion etched and SiCI4 reactive ion etched silicon (100)

Author： Murtagh M.   Lynch S. M.   Kelly P. V.   Hildebrandt S.   Herbert P. A. F.   Jeynes C.   Crean G. M.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.13, Iss.11, 1997-11, pp. : 961-964

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