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Publisher: IOP Publishing
E-ISSN: 1361-6439|25|12|125013-125022
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.12, 2015-12, pp. : 125013-125022
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Abstract
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By Leopold S Mueller L Kremin C Hoffmann M
Journal of Micromechanics and Microengineering, Vol. 23, Iss. 7, 2013-07 ,pp. :