Experimental and theoretical study of dynamic effects in low-frequency capacitively coupled discharges

Author： Braginsky O   Kovalev A   Lopaev D   Proshina O   Rakhimova T   Vasilieva A   Voloshin D   Zyryanov S  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.45, Iss.1, 2012-01, pp. : 15201-15212

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