The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

Author： Schulze J   Schüngel E   Donkó Z   Czarnetzki U  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.20, Iss.1, 2011-02, pp. : 15017-15028

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