Numerical study of dual-frequency capacitively-coupled discharges in electronegative $\chem{SF_{6}}$

Publisher： Edp Sciences

E-ISSN： 1286-4854|75|1|63-69

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.75, Iss.1, 2006-07, pp. : 63-69

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