A semi-analytic collisionless sheath model for multicomponent plasmas and ion energy and angular distributions at rf-biased electrodes

Author: Kwon Deuk-Chul   Song Mi-Young   Yoon Jung-Sik  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.46, Iss.2, 2013-01, pp. : 25202-25208

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