An analytical model for time-averaged ion energy distributions in collisional rf sheaths

Author: Chen Wen-Cong   Pu Yi-Kang  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.34, 2014-08, pp. : 345201-345210

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next