Collisional effect on the time evolution of ion energy distributions outside the sheath during the afterglow of pulsed inductively coupled plasmas

Author： Lee J B Chang H Y Seo S H

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.6, 2013-12, pp. : 65008-65018

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