Electrical Properties of Dielectric and Ferroelectric Films Prepared by Plasma Enhanced Atomic Layer Deposition

Author: Lee Won-Jae   Shin Woong-Chul   Chae Byung-Gyu   Ryu Sang-Ouk   You In-Kyu   Cho Seong Mok   Yu Byoung-Gon   Shin Byoung-Chul  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.46, Iss.1, 2002-01, pp. : 275-284

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content