Pt–Al₂O₃ dual layer atomic layer deposition coating in high aspect ratio nanopores

Author： Stemme Göran Roxhed Niclas Pardon Gaspard Gatty Hithesh K

ISSN： 0957-4484

Source： Nanotechnology, Vol.24, Iss.1, 2013-01, pp. : 15602-15612

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