Fabrication of Al 2 O 3 Coated 2D TiO 2 Nanoparticle Photonic Crystal Layers by Reverse Nano-Imprint Lithography and Plasma Enhanced Atomic Layer Deposition

Author： Kim Ki-Kang   Ko Ki-Young   Ahn Jinho  

Publisher： American Scientific Publishers

ISSN： 1533-4899

Source： Journal of Nanoscience and Nanotechnology, Vol.13, Iss.10, 2013-10, pp. : 7184-7187

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